Nuclear Engineering Seminar: Enabling nanoscale electronics fabrication with plasma science


2:30 pm-3:45 pm
Add to Outlook/iCal
Add to Google Calendar


Rhines Hall Room 125
Rhines Hall
Gainesville, FL 32611


Join NE for light refreshments and a discussion on nanoscale electrons with Dr. Steven Shannon of North Carolina State University.

Plasma science has made substantive contributions to the synthesis of novel materials and structures for societal benefit for decades. The most extensive contribution has been in the continued performance improvements in semiconductor device manufacturing, where plasmas play a critical role in approximately 1/4 of the hundreds of process steps it takes to fabricate an integrated circuit. In this talk, advances in methods to control the combination of unique non-thermal reactive chemistry and ion bombardment to fabricate structures with nanometer-scale length will be presented.


Hosted by