 50nm-Thick Nano-Laminated Ferroelectric Hf0.5Zr0.5O2 Transducers for In-Plane Bulk Acoustic Resonators Troy Tharpe and Faysal Hakim Authors: Troy Tharpe, Faysal Hakim, Roozbeh Tabrizian Faculty Mentor: Roozbeh Tabrizian, PhD College: College of Engineering Department: Electrical and Computer Engineering |
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AbstractThis work demonstrates the use of 50nm-thick ferroelectric hafnium zirconium oxide (Hf0.5Zr0.5O2) nanolaminates to realize in-plane, bulk acoustic wave (BAW) resonators with quality factors (Qs) exceeding 500 and lithographically defined resonant frequencies up to ~700 MHz. By interposing 1nm-thick aluminum oxide between 10nm-thick Hf0.5Zr0.5O2 layers, the presented nanolaminate transducer is scaled beyond the ~20nm thickness-limit of Hf0.5Zr0.5O2 ferroelectric orthorhombic crystal phase. The increased transducer thickness enables substantial enhancement of resonator Q and power handling, while sustaining ferroelectric switchability and piezoelectric coupling. Various resonator prototypes are implemented, showing lithographically scalable resonance frequencies over 108 – 691 MHz, Qs exceeding 500, and fres×Q products up to 1.84 E11.
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Poster
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