NIMET administers several laboratory classes that offer a combination of lecture/theory and practical, hands-on experiences. These classes use the NRF Teaching Lab and the NRF User Facility.
- EEE 5354L Semiconductor Device Fabrication (3 credits) – In this course, students will gain hands-on experience in semiconductor material characterization and device fabrication techniques. Over the course of 12 weekly labs, students will make four-point-probe and Hall-effect measurements, perform photolithography and film deposition/etching, build and characterize a MOS diode, and more. Students will also get a tour inside the NRF cleanroom. Some prior knowledge of microfabrication and semiconductor device physics is highly recommended. Instruction by Faculty.
- EGN 5010L NRF Training – Photolithography (1 credit) – This course is intended for prospective NRF cleanroom users. The class will teach students the fundamental and practical aspects of photolithography via a combination of 7 lectures and 7 labs. Students will also become trained on the following NRF tools: Spinners/Hotplates, Filmetrics Photospectrometer, MA6 Mask Aligner, and EVG Mask Aligner. Instruction by NRF Staff.
- EGN 5010L NRF Training – Advanced Lithography (1 credit) – This course is intended for prospective NRF users. The class will instruct students on advanced, direct-write lithography capabilities in the NRF via a combination of lectures and labs. Students will become trained on the following NRF tools: Raith 150 E-beam Lithography, Raith ionLine Multi-species FIB System, and Heidelberg Laser Lithography System. Instruction by NRF staff.
- EGN 5010L NRF Training – Backend Processing (1 credit) – This course is intended for prospective NRF users. The class will instruct students on backend processing techniques–substrate thinning/polishing, dicing, die attach, wire bonding, etc.–via a combination of lectures and labs. Students will become trained on the following NRF tools: Lapper/Polisher, ADT Dicing Saw, and K&S 4124 Ball Bonder. Instruction by NRF staff.
- EMA 4935 Electronic Materials Lab (1 credit) This class provides hands-on experience for undergraduate students specializing in electronic materials. Laboratory topics include processing of electronic materials, device fabrication, and characterization of optical and electronic properties of semiconductor materials. Experiments include photolithography, thin film deposition, oxide thin film growth, fabrication of Schottky diodes and polymer light emitting devices.